Microsystems Technology

Fraunhofer Institute for Silicon Technology

Mikrosystemtechnik

Research in the field of microsystems technology is in the main focus of different departments of ISIT. For more than 25 years ISIT scientists are working on the development of micromechanical sensors and actuators, micro-optic, and components for radio-frequency applications (RF-MEMS). Their work in this area also includes integrating these components with microelectronics to create small-size systems of high functionality.