Microsystems Technology

MEMS-Scanner for efficient laser-material-processing – succesful bridging between micro- and macro world

Laser material processing is a key technology in the production of modern quality products. Faster laser beam deflection systems can significantly improve this technology.
Fraunhofer ISIT has added the advantages of MEMS scanner technology to macroscopic conditions. Novel scanner mirror with apertures up to 2 cm now allow highly dynamic two-axis laser beam deflection for CW laser power up to 500 Watts. These compact MEMS scanner opens up new applications and products.