Fraunhofer Institute for Silicon TechnologyCMP 45
Presentations of the 45th WET Users Group Meeting 2023
- Participants
- Agenda
- Andre Lauff - CMP: Application challenges by using Optical Endpoint
- Tom Rothe - Can empirical physics models improve machine learning performance using planarization data
- Andreas Zienert - Automatic Analysis of CMP Dishing in Via Arrays from AFM Images
- Mario Stella - General CMP Introduction
- Johannes Sporrer - HighQFactory
- Scott Lawing - Pad Material Property Effects on Conditioning Response
- Marko Lisker - CMP of SiGe-Substrates for Spin-Qubit Applications
- Bob Roberts - CMP activities in North America