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Events
CMP-Usermeetings
cmpum28
Events
30. User Meeting
Agenda, participant's list and all 6 talks:
30. CMP Usermeeting [ ZIP 8.54 MB ]
Single Talks:
Agenda 30th CMP Users Meeting [ PDF 0.01 MB ]
Participants [ PDF 0.08 MB ]
J.Leighton, AMAT, BSOI CMP [ PDF 1.14 MB ]
D.Tsvetanova, imec, Amorphous Si CMP for FinFETs [ PDF 1.82 MB ]
J.-C.Millet, Rockwood, Wafer Preparation before Bonding [ PDF 1.44 MB ]
A.Philipossian, UofAZ, Pad Wafer Contact Area [ PDF 2.03 MB ]
W.Melzig, FRT, Nanotopography Characterization [ PDF 0.89 MB ]
A.Philipossian, Araca, Novel Slurry Injection System [ PDF 1.26 MB ]
Fraunhofer Institute for Silicon Technology