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Fraunhofer Institute for Silicon Technology
Fraunhofer Institute for Silicon Technology
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Events
CMP-Usermeetings
CMP 41
Events - 41st CMP Users Meeting
41. Users' Meeting
Single Talks:
Participants [ PDF 0.11 MB ]
C. Guhl et al., STI-Slurry Screening for Advanced Nodes in Foundry Production [ PDF 0.81 MB ]
K. Vandersmissen, 60mm PWG3 Resolution Benefit Explored on STI CMP Application [ PDF 1.34 MB ]
A. Haft, Fundamental polishing investigations of a novel pad type with regular surface pattern [ PDF 1.14 MB ]
V. Balan et al., Diamond Disk Conditioning vs. Retainer Ring Impact on Poromeric Pad Microtexture [ PDF 4.93 MB ]
M. Demmler, Limits and Applications of Ion Beam Trimming [ PDF 1.69 MB ]
G. Zwicker, Some Highlights from C.A.M.P.-Meeting [ PDF 16.61 MB ]
ICPT 2020 Portland, OR USA - Introduction [ PDF 2.24 MB ]
Agenda 12th Wet & 41st CMP Users Meeting [ PDF 0.04 MB ]
Fraunhofer Institute for Silicon Technology