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Events
CMP-Usermeetings
cmpum28
Events
1. Wet Users Meeting
Agenda, participant's list and all 6 talks:
1. Wet Usermeeting [ ZIP 11.06 MB ]
Single Talks
Agenda 1st Wet Users Meeting [ PDF 0.01 MB ]
Teilnehmer [ PDF 0.08 MB ]
K.Gottfried, Fraunhofer ENAS, Introduction to Wet Users Group [ PDF 0.14 MB ]
Th.Werner, Globalfoundries, 28nm Wet Processing Challenges [ PDF 1.66 MB ]
K.Tuttner, ams, Through Silicon Via Clean [ PDF 1.19 MB ]
D.Dussault, ProSys, Physical Cleans - Elimination of Brushes [ PDF 2.98 MB ]
R.Krause, Fraunhofer CNT, Additive Interaction on Cu-ECD [ PDF 0.88 MB ]
S.Esche, bubbles&beyond, Innovations for Wet Strip and Clean [ PDF 4.19 MB ]
Fraunhofer Institute for Silicon Technology