Piezoelectrically driven MEMS scanner

1D PZT resonant micromirror
1D PZT resonant micromirror
2D PZT resonant micromirror
2D PZT resonant micromirror
gimbal-mounted 2D-micro mirror with resonant and quasi-static drive
gimbal-mounted 2D-micro mirror with resonant and quasi-static drive

Micro mirrors driven by the piezoelectric material PZT (lead zirconate titanate) are attracting more and more interest today mainly because of the advantages such as low drive voltage and high drive force. The development has been advanced in recent years at ISIT, where different 1D-, 2D-micro mirrors as well as the corresponding position sensors have been designed and manufactured.
While the 1D-PZT micro mirrors achieve very large optical scanning angles (up to 106°) and have a wide frequency range (quasi-static up to 69 kHz), the 2D micro mirrors are suitable for lissajous, raster and circular scanners. In addition, translational movements with large amplitudes (up to 1600 µm) have been realized by the PZT micro mirrors. Position detection of the micromirrors was made possible by capacitive, piezoelectric sensor elements and metallic strain gauges and these provide measurement signals with high resolution up to 14 bit.
ISIT provides several patents for the design development of the micromirrors and position sensor elements as well as for their production. Furthermore, ISIT offers further developments of the individual manufacturing steps based on the existing technology.