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Cooperation with Fraunhofer ISIT
Research Fab Microelectronics Germany
Prof. Dr. rer. nat. habil. Axel Müller-Groeling
ISIT Quality-Managementsystems
Power Electronics
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Power Electronics
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MEMS-Applications
Optical Systems
3D Camera
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MEMS Energy Harvesting
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Power Electronic
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GaN-Transistor
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Chemical Vapor Deposition (CVD)
Sputtern & Evaporieren
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Electroless Ni / Pd / Au Plating (ENEPIG)
Reactive Ion Etch (RIE)
Chemical-mechanical polishing (CMP)
Assembly production, quality and reliability
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Poly Silicon MEMS Technology Platform
Piezo MEMS Technology Platform
Powder MEMS Technology Platform
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Powersystems Simulation Design Analysis
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Fraunhofer Institute for Silicon Technology