Photonics West SPIE 2020

Fraunhofer ISIT goes to the Photonics West SPIE 2020 in San Francisco! This year is all about microactuators for optical applications: high power laser-scanners, LiDAR systems and glas-packages.


Laser Material Processing
High Power Laser Scanner(with stroboscope illumination)
Laser material processing, laser welding, laser cutting etc.
The new MEMS scanners developed by Fraunhofer ISIT allow fast deflection of laser radiation with up to 4.5 kWatt at scan frequencies in the kilohertz range. For many manufacturing processes, this allows a considerable increase in throughput and, in many cases, new functionality and quality improvements. Dielectrically coated highly reflective mirrors with apertures of up to 20 mm are unique worldwide.


LIDAR Systems / 3D Camera
The 3D camera is based on a 2D MEMS scanner which uses the principle of the phase difference of an emitted laser beam to the detected "echo" as distance measurement.
The phase detection algorithm enables 60 million 3D measurements per second. The camera has a resolution of 450 x 450 pixels and delivers six images per second. The depth resolution should be a few millimetres and the maximum detectable distance to the object is 2 m.


Glass packages for wafer-level packaging
Development of remelted glass wafers to achieve specially adapted optical functions.
Based on a forming technology of glass wafers developed and patented by Fraunhofer ISIT, micro lenses, reflectors and specially shaped optical windows can be mass-produced on wafer level, which allows a cost-effective mass production of micro-optical components. In combination with MEMS scanners and IR-MEMS devices, this manufacturing process is the key to hermetically sealed MEMS devices with optimal optical functionality.


Visit us at the Moscone Center, booth 4083.

MEMS-Anwendungen Optische Systeme

Fraunhofer ISIT has more than 20 years of experience in the development of optical microsystems. Optical microsystems are a key focal point in the MEMS business unit. ISIT develops MEMS scanners - that is to say scanning micromirrors including control and read electronics for different kinds of laser projection displays, for optical measuring and detection systems (such as LIDAR), and power applications in the fields of laser material processing and generative manufacturing. Based on a patented fabrication process, ISIT is currently the world’s only manufacturer of wafer-level vacuum packaged dual-axis MEMS scanners. Operating these scanning micromirrors in a vacuum environment offers signifi cant advantages.

More Information.

Fraunhofer ISIT Paper and Poster Presentations

Session 1: Micro-mirrors

A triple-wafer-bonded AlScN driven quasi-static MEMS mirror with high linearity and large tilt angles
Paper 11293-3

Presentation by: Shanshan Gu-Stoppel
Saturday, February 1, 2020, 9:00 AM - 9:20 AM
Location: Room 204 (Level 2 South)

Authors: Shanshan Gu-Stoppel, Thomas Lisec, Maria Claus, Nico Funck, Simon Fichtner, Saskia Schröder, Bernhard Wagner, Fabian Lofink, Fraunhofer ISIT


Session 1: Micro-mirrors

A bi-axial vacuum-packaged piezoelectric MEMS mirror for smart headlights
Paper 11293-4

Presentation by: Shanshan Gu-Stoppel
Saturday, February 1, 2020, 9:20 AM - 9:40 AM
Location: Room 204 (Level 2 South)

Authors: Frank Senger, Jörg Albers, Gundula Piechotta, Thorsten Giese, Felix Heinrich, Shanshan Gu-Stoppel, Fraunhofer ISIT;  Ulrich Hofmann, Thomas von Wantoch, OQmented GmbH

Session 2: LIDAR

Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR
Paper 11293-8

Presentation by: OQmented GmbH (spinn-off of Fraunhofer ISIT)
Saturday, February 1, 2020, 11:30 AM - 11:50 AM
Location: Room 204 (Level 2 South)

Authors: Frank Senger, Jörg Albers, Pauline Malaurie, Felix Heinrich, Dirk Kaden, Hans-Joachim Quenzer, Fabian Lofink, Fraunhofer ISIT; Christian Janicke, Leon Pohl, Fabian Schwarz, Thomas von Wantoch, Ulrich Hofmann, OQmented GmbH


Download Info incl. Abstracts.

Photonics West SPIE 2020

SPIE, the International Society for Optics and Photonics, was founded with the aim of advancing light-based technologies. The Society organizes and sponsors approximately 25 major technical forums, exhibitions and educational programs annually in North America, Europe, Asia and the South Pacific.

One of them is SPIE Photonics West, which opens its doors in San Francisco from February 1 - 6, 2020. With around 23,000 visitors, it is the largest and most influential event in North America.

You can find us at the Moscone Center, booth 4083.



Photonics West SPIE 2020 
The Moscone Center | San Francisco



What: Photonics West SPIE

Where: The Moscone Center, booth 4083

When: February 1 - 6, 2020

We are looking forward to your visit!

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