Fraunhofer Institute for Silicon TechnologyJune 24 -27, 2019, Hall B3, Booth 335
Fraunhofer ISIT at Laser 2019 in Munich
At the world's leading trade fair for photonics components, systems and applications, Fraunhofer ISIT presents current research topics under the headline Micro-Actuators for Optical Applications.
Piezoelectric driven MEMS scanner with large scan angel of 160°
ISIT presents hermetically sealed 2D micro-mirror scanners for laser projection displays, systems for LIDAR distance measurement and laser material processing.
Another focus are packages for microoptical systems on wafer level.
Based on a glass wafer forming technology, developed and patented by Fraunhofer ISIT. Microlenses, reflectors and specially shaped optical windows can be produced on wafer level in large quantities, which enables a cost-effective production.