Dualeye+

Smart 3D LiDAR Sensor Technology: Fraunhofer ISIT Advances Key Technology in the Dualeye Project

© Fraunhofer ISIT

Together with international partners, a smart next-generation 3D LiDAR sensor is currently under development, aiming to redefine range, accuracy, and functional safety. The aim of the project is to make LiDAR technology more powerful, robust, and cost-efficient for industrial applications, autonomous vehicles, and robotics. In doing so, the project addresses a globally growing market that is expected to see double-digit growth over the next five years.

From Innovative Concept to Market-Ready Technology

LiDAR (Light Detection and Ranging) is a laser-based remote sensing technology that precisely measures distances and maps environments in three dimensions. In recent years it has gone through several phases of innovation, ranging from early research applications to everyday industrial solutions. With the rise of high-tech fields such as autonomous vehicles and mobile robots, global competition for this key technology has intensified. While early market leadership and patent activity were concentrated among a limited number of players, other regions have been rapidly strengthening their capabilities in recent years. This is exactly where the Dualeye project comes in. At its core is a smart 3D LiDAR sensor with active control of the field of view. This is made possible by the synchronous actuation of multiple two-dimensional MEMS mirrors, which steer the laser beam in a targeted and flexible way. Compared to conventional approaches, this concept enables a higher degree of adaptability across various use scenarios, from long-range detection to high-resolution near-field analysis.

© Fraunhofer ISIT

Advanced Materials Driving New Performance Capabilities

A technological breakthrough is being realized through the development of a two-axis MEMS mirror element based on the novel piezoelectric material aluminium scandium nitride (AlScN). This material is regarded as the next generation of piezoelectric thin films because it not only offers high actuation efficiency and precise controllability but also supports complementary metal-oxide-semiconductor (CMOS)-compatible wafer-level processing. The resulting 2D MEMS mirror scans the laser beam particularly quickly and accurately, significantly improving the response speed and reliability of the overall system. By combining the AlScN-based piezoelectric 2D MEMS mirror with a cutting-edge 2D single-photon avalanche diode (SPAD)-based direct time-of-flight (dTOF) sensor IC capable of detecting single photons (developed by Solid-Vue within the consortium), the system delivers highly precise 3D data in real time—even over long distances. Its compact sensor design reduces the overall system footprint, further enabling seamless integration in industrial environments.

International Collaboration as a Success Factor

© Fraunhofer ISIT

The project is conducted through a close international collaboration between Korea and Germany. Fraunhofer ISIT (Participating Institute 1) steers light toward the target region of interest using 2D piezoelectric MEMS mirror, while Solid-Vue (Participating Institute 2) detects the surrounding environment with SPAD-based dTOF sensor. The overall system integration is then carried out by the lead institute, Autonics Co.. Together, we are driving a focused strategy forward: based on the in-house developed AlScN thin-film technology, market-ready piezoelectric 2D MEMS mirrors will be developed. This will enable the creation of a smart 3D LiDAR system that operates reliably, safely, and cost-effectively, supporting the project partners in reaching their desired technological milestones internationally.

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VerGaN

 

TroPMelt

 

Dualeye+

 

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DC-KORE