Optical Systems

Smart Optical Systems for Communication & Sensor Technology to shape the XXIst century

Fraunhofer ISIT has more than 30 years of experience in the development of optical microsystems. ISIT offers its customers the development of products and technologies in the field of microelectromechanical systems (MEMS). In doing so, Fraunhofer ISIT covers the entire development chain for MEMS systems: from concept to technology.

© Fraunhofer ISIT/ Eric Shambroom Photography 2020
© Fraunhofer ISIT/ Eric Shambroom Photography 2020
© Fraunhofer ISIT/ Eric Shambroom Photography 2020

Your benefits

Fraunhofer ISIT develops both vector scanners and resonant MEMS scanners including drive electronics for various types of laser projection and optical communication, for optical measurement and detection systems (e.g. LIDAR), for high laser power applications in the field of material processing and generative manufacturing as well as for use in optical telecommunication.

ISIT has a modern 200 mm clean room line for the development and fabrication of silicon and glass microsystems. Due to many years of experience in the development and production of MEMS and MOEMS components, ISIT has a broad portfolio of mature individual processes, as well as various process platforms. By adapting the existing processes to the respective customer requirements, individual solutions can be realized at short notice and transferred to pilot production.

Under the slogan "development and production at one location", ISIT transfers the developed components from prototype to small series production. Together with our industry partners on site a seamless transition to the industrial production of large quantities is finally achieved.

Our portfolio

  • Fast laser scanner
  • Beam positioning system
  • Microlenses & Micro-Optics
  • Beam shaping elements
  • Apertures
  • Micromirror Arrays
  • Opto-Packages for UV to IR
  • Infrared sensor technology
  • Display technology

Our offer

  • System conception
  • Simulation
  • Failure analysis
  • Design
  • Manufacturing
  • Wafer-level packaging
  • Pilot production
  • Packaging and interconnection
  • Characterization

Application fields

  • Automotive Industry
  • Medical Technology & Diagnostics
  • Industry
  • Telecommunications
  • Consumer industry

Use Cases



Fraunhofer ISIT has developed a 3D camera based on a 2D MEMS scanner.


Laser material processing

Laser material processing is a key technology in the manufacture of modern quality products.


Piezoelectric driven MEMS scanner

Piezoelectric AlScN realizes high driving force, good linearity & long-term stability with low power consumption.


6-axis IMU device (inertial measurement unit, IMU)

MEMS inertial sensors are used for active and passive safety systems such as vehicle dynamics control but also navigation systems.