Power Electronic

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Micro Fabrication Technologies

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MEMS-Applications

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Technology

© Eric Shambroom Photography 2020
© Eric Shambroom Photography 2020

ISIT has an industrial 200 mm silicon technology (2500 m²) for front-end processes (MOS and PowerMOS). Specific processes for MEMS and NEMS as well as for packaging are performed in a newly built clean room (1000 m²).

Additional laboratories with an area of 1500 m² are maintained for electrical and mechanical characterization of devices, packaging and interconnect technology and for reliability investigations.

ISIT also operates a pilot production line for Li-polymer accumulators. ISIT's facilities have been ISO 9001 certified for many years. 

 

Technology platforms of Fraunhofer ISIT

 

Power Electronics

 

Micro-Manufacturing Processes

 

MEMS-Applications