One major focus at ISIT is the development of highly miniaturized, integrated MEMS loudspeakers. In contrast to conventional electrodynamic speakers, these novel chip speakers are based on piezoelectric high-performance MEMS actuators. The MEMS loudspeakers are manufactured using state-of-the-art silicon technology, which not only enables micrometer-precise manufacturing but also cost-efficient mass production. In addition to outstanding acoustic performance as well as enhanced functionalities, the MEMS speakers feature significantly smaller sizes and superior energy efficiency, making them particularly attractive for mobile applications such as augmented reality, hearables, wireless headphones and hearing aids.
Fraunhofer Institute for Silicon Technology