Poly Silicon MEMS Technology Platform

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Piezo MEMS Technology Platform

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Powder MEMS Technology Platform

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MEMS-Applications

ISIT has a wide portfolio of qualified single process technologies available, which were combined to three MEMS specific technology process platforms. They form a kind of tool box to realize various applications.

Poly Silicon MEMS Technology Platform

Piezo MEMS
Technology Platform

Powder MEMS
Technology Platform