Fraunhofer Institute for Silicon Technology
Laser material processing is a key technology in the production of modern quality products. Faster laser beam deflection systems can significantly improve this technology.
Fraunhofer ISIT has transferred the advantages of MEMS scanner technology to macroscopic conditions.
Novel scanner mirrors with apertures down to 2 cm now allow highly dynamic biaxial laser beam deflection for CW laser powers up to 500 watts.
These compact MEMS scanners thus open up new fields of application and products.
