Acoustic Systems and Micro Actuators

For many years, Fraunhofer ISIT has been working together with partners from research and industry in the field of acoustic microsystems.

MEMS Speaker

One focus is the development of highly miniaturized, integrated MEMS loudspeakers. In contrast to conventional electrodynamic speakers, these novel chip speakers are based on piezoelectric high-performance MEMS actuators. The MEMS loudspeakers are manufactured using state-of-the-art silicon technology, which not only enables micrometer-precise manufacturing but also cost-efficient mass production. In addition to outstanding acoustic performance as well as advanced functionalities, the MEMS speakers feature significantly smaller sizes and superior energy efficiency, making them particularly attractive for mobile applications such as augmented reality, hearables, wireless headphones and hearing aids. 

Ultrasound transducer

Miniaturized ultrasound transducers represent a research focus. Depending on the frequency range and application, the transducers at ISIT are designed as membrane or open bending transducers. The basis is formed by highly developed process technology platforms with the piezoelectric high-performance materials AlN, AlScN and PZT, enabling very high sound pressure levels and sensitivities. In this way, efficient ultrasonic transducers with center frequencies ranging from a few kHz to several MHz can be realized. The components developed include ultrasonic arrays for non-contact human-machine interfaces, medical technology applications and non-destructive testing technology.

Surface Acoustic Wave Sensors

Sensors based on the modulation of surface acoustic waves (SAW) can be used to measure various physical phenomena: In addition to mass absorption, elastic, viscoelastic or electrical effects can be exploited. Dedicated functional layers allow a wide range of applications with pressure, humidity, electric field, vibration, gas, bio or magnetic field sensors.