Acoustic systems and microdrives

For many years, Fraunhofer ISIT has been working together with partners from research and industry in the field of acoustic microsystems.

© Fraunhofer ISIT
Illustration of a MEMS-based in-ear system

MEMS loudspeaker

One focus is the development of highly miniaturized, integrated MEMS loudspeakers. In contrast to conventional products, these novel chip speakers are based on high-performance MEMS drives. The MEMS loudspeakers are manufactured using state-of-the-art silicon technology, which not only enables micrometer-precise manufacturing but also cost-efficient mass production. In addition to outstanding acoustic performance as well as advanced functionalities, the MEMS speakers feature significantly smaller sizes and superior energy efficiency, making them particularly attractive for mobile applications such as augmented reality, hearables, wireless headphones and hearing aids. For the benefit of ISIT's customers, the actuator and speaker concepts are patented.

© Fraunhofer ISIT
MEMS Ultrasound Array for Air-Guided Ultrasound

Ultrasound transducer

Miniaturized ultrasound transducers represent a research focus. Depending on the frequency range, the transducers at ISIT are designed as piezoelectric thickness or membrane transducers. The basis is formed by highly developed process technology platforms with the piezoelectric high-performance materials AlN, ScAlN and PZT, whereby very high sound pressure levels as well as sensitivities are possible. In this way, efficient ultrasonic transducers with center frequencies ranging from a few kHz to several hundred MHz can be realized. The components developed include ultrasonic arrays for non-contact human-machine interfaces, medical technology applications and non-destructive testing technology.

MEMS In-Ear Speaker

Ultrasound transducer

Project:
MEMS-Harvester