Sputtering and evaporation are two processes for making conductive, semiconductive, and insulating layers that have a non-crystalline structure. Thus, layers can be produced in a deposition process with amorphous and polycrystalline structure.
Sputtering and evaporation are two processes for making conductive, semiconductive, and insulating layers that have a non-crystalline structure. Thus, layers can be produced in a deposition process with amorphous and polycrystalline structure.
Our LLS EVO2 magnetron sputtering system from Oerlikon (Evatec) has a process chamber with 5 DC sputtering sources (one of which is RF) and a lock chamber equipped with a degas device and an RF etching device. For the high vacuum one uses the cryotechnology. The substrate basket with the substrates rotates about its own axis during the process.
The ISIT has a BAK 760 vapor deposition system from Oerlikon (Evatec). The system uses electron beam to vaporize the material. It is equipped with two beam sources.