At Fraunhofer ISIT we use for SEM (scanning electron microscopy) analysis in nm-dimensions a CrossBeamâ 1540EsB from Carl Zeiss. Samples can be tilted in the analysis chamber. This is necessary for FIB (focused ion beam) preparation and depiction of topographic of the sample. By FIB samples can be analyzed several micrometer in the depth, even if the analyzing spot is smaller than in the range of micrometer.