Fraunhofer Institute for Silicon Technology
Miniaturized ultrasonic transducers are a central research area at Fraunhofer ISIT. Depending on the frequency range, these transducers are designed as piezoelectric thickness or membrane transducers. The basis for this are highly developed process technology platforms that use the high-performance piezoelectric materials AlN, ScAlN and PZT. This enables very high sound pressure levels and sensitivities to be achieved. It is possible to develop efficient ultrasonic transducers with center frequencies from a few kHz up to several hundred MHz. The components developed include ultrasonic arrays that are used in non-contact human-machine interfaces, in medical technology and in non-destructive testing technology.
Fraunhofer ISIT: MEMS ultrasound array for air-guided ultrasound