The Fraunhofer ISIT and Vishay Semiconductor Itzehoe GmbH are operating a professional semiconductor production line with 200mm Si-wafers. The production line is used by Vishay for the production of power semiconductors (PowerMOS and IGBT) and by ISIT for development projects.
Based on a qualified production technology ISIT has a large number of state-of-the-art semiconductor processes available which are used for different development duties. Highlights are the technology to work with ultra-thin substrates (<50µm) and the dopant activation by laser annealing. Also the ISIT offers a multitude of special ‘back end’ processes for example new processes of metallization for advanced technologies in electronics packaging.