The Fraunhofer Institute for Silicon Technology ISIT is a center of excellence for process related problems in the field of microelectronic and micromechanical manufacturing. The organizational structure is designed to combine research and production at one location. Process development and pilot production share the same equipment, which is state of the art for volume production. The high degree of automation enables a fluent transition from process development to batch production with typically 24 wafers per batch. Especially small components can be manufactured in large numbers within a pilot production. In case this pilot production cannot cover the customer's required quantity the process can be handed over to our industrial partner X- FAB MEMS Foundry Itzehoe for industrialization and volume production.