Silicon Membrane Technology

Fraunhofer ISIT has developed a silicon membrane technology to create filters for a variety of material analyses. The technology offers a polymer-free realisation of filter structures for the analysis of micro- and nanoparticles. The filter structures enable particle visualisation, sizing and identification. Different surface coatings can be used to achieve low spectroscopic interference. Numerous pore diameters can be realised for different filtration ranges.

Silicon membrane technology offers all design dimensions of filter structures with the advantages of diverse surfaces such as aluminium oxide and gold coating. Our silicon membranes have a homogeneous filter surface (unlike polycarbonate or glass microfibre filters).

Examples of applications are: Micro/nanoplastic detection, gas and liquid filtration, diagnostics and optical filters.

Technical specifications

• Pore sizes: 200 nm and higher
• Membrane thickness: 2 µm 
• Coating materials: Al, Au
• Filter diameter: 25 mm (filtration area 10 mm)

Examples of application

• Filtration against contaminants (micro/nanoplastics, viruses, etc.)
• Gas and liquid filtration 
• Lab on chip diagnostics
• Optical filters

Download the prospect.