Silicon Membrane Technology

Companies and research institutions are faced with the task of reliably detecting, visualizing, classifying, and filtering micro- and nanoparticles in liquids or gases. Conventional polymer or glass microfiber filters suffer from

• heterogeneous filter surfaces and low precision
• spectral interference in analysis procedures
• limited pore sizes and distributions
• lack of robustness at high pressure

• Development of macroporous silicon membranes through electrochemical etching
• Precise design of regularly distributed nanopore sizes (from 200 nm)
• Ultra-thin membrane thickness of only 2 µm for maximum pressure resistance
• Special surface treatment to increase contrast during analysis
• Coating materials: aluminum oxide (Al₂O₃) and gold (Au)
• Integrated alignment system on the filtration surface
• Pilot production and clean room follow-up at the ISIT site

• Micro/nanoplastic detection in water and environmental samples
• Virus and contaminant filtration in biological samples
• Gas and liquid filtration for analytics and process monitoring
• Lab-on-chip diagnostics with optical particle identification
• Optical filter systems with low spectral interference