Fraunhofer Institute for Silicon Technology
Fraunhofer Institute for Silicon Technology

Projects

MEMS applications

 

  • PiMAR1 - Manufacturing and improving the manufacturability of piezo-MEMS based hermetically encapsulated mirrors for AR/VR applications
  • PoP4SiG - Development of PowderMEMS X-ray gratings for medical applications
  • PowderGRID-NDT - X-ray grids for non-destructive material analysis
  • SFB1261 Magnetoelectric sensors - from composite materials to biomagnetic diagnostics
  • X-Celeprint-GALVI - Au-elctroplating of customer supplied wafers
  • ActiveWave - Active waveguides
  • DFG-1D Fast MEMS Mirror for LIDAR - MHZ 1D MEMS Mirror for LIDAR
  • Dualeyes+ - MEMS Mirror for industrie LIDAR- Dualeys
  • FocusMEMS - AlScN based AF devices
  • FQS_FBH Quanten Sensorik - MEMS mirror for quantum-sensing
  • Gyro23 - IMU Device
  • HIM - High-speed sinterferometer with micromirror
  • ILEMO - Integrated lens system for the optically neutral encapsulation of MEMS optical components
  • IMU device - 6DOF IMU Devices
  • IMU für Konsum Produkt - Development of IMU devices for consumer products
  • KonneQt - MEMS mirrors for internal connectivity in quantum computing
  • MEMS mirror for Auto-LIDAR
  • MEMS Spiegel for Methology - MEMS mirror with circular movement to reduce measurement noise
  • MEMS Mirror with Silflex - MEMS mirror with Silflex as reflective surface
  • MEMS-Boro BMWi 13.04.22 - Development of a 3D endoscope based on a MEMS 3D camera for the inspection of engine components
  • MEMSIC 6IMU - Development of accelerator and gyroscope for consumer products
  • MIACAP - Construction kit for modular optical superstructures
  • VIP+ HERMES - Production of ultra-compact MEMS sensors using laser-based integration processes
  • AlScN bilayers for MEMS devices - Evaluation of piezoelectric AlScN bilayers für MEMS devices
  • Discover Aktiv-Scan - Acousto-mechanical drive for vector scanners
  • Discover NVControl - Controlling NV spin states in diamonds with magnetoacoustic surface waves for scalable quantum chips
  • MiniMe - Miniaturized metamaterials for MEMS ultrasonic transducers
  • PRECISE - Intelligent solution for sustainable meat production and consumption
  • PZT Prozess Evatec - Evaluation of a PZT process developed by ISIT for the implementation on the CLN200 PZT production tool of EVATEC
  • SALSA - Ferroelectricity in ScAIN: from the discovery of the effect to disruptive devices
  • SPKR Push - Development of A-samples of ISIT microspeakers
  • VIP+ Feelscreen - High-performance PMUTs for haptic displays
  • WiVoPro NV-Control - Pre-project for photonics and quantum technologies
  • PowderBat - ALD-solidified powder electrodes for integrated micro solid-state batteries
  • Smarties - MEMS Energy Harvesting for Smart Tires

Research center FAB-SH

  • COBRA - CObalt-free Batteries for Future Automotive Applications
  • FB2 Hybrid - Joint project: Cross-sectional platform hybridization; Subproject: Processing of hybrid solid-state electolytes and cathodes into solid-state batteries by means of dry coating processes
  • MoPeNZ - Modular open platforms for electronic commercial vehicles
  • QuW-LIB - Qualification and further training of specialists along the entire value chain of sustainable lithium-ion batteries
  • SiLine - Development of large-area, porous Si film anodes for lithium/silicon NMC energy storage devices (SiLiNE) towards industrial production
  • NUBase - Joint project: Novel investigation methods for battery safety; sub-project: Clarification of damage processes by means of cell-internal sensor technology
  • TroPMelt - Dry coating “Dry powder melt calendering for environmentally friendly and cost-effective electrode production”
  • BeLiMIA - Observation of lithium-ion cells using a combination of measurement methods to identify and quantify ageing processes
  • CAPTN Eergy public project 2nd2Sea - Construction of a stationary storage system from 2nd life batteries for charge buffering
  • Qualification of pouch films - testing the suitability of the AluFlex® pouch film produced by Bischof + Klein for use in lithium-ion pouch cells and possible use in the FFB Münster
  • SimBAS - Simulation of battery cells and applications in storage systems

Power Electronics

  • SCALING - Scandium aluminum nitride for linear broadband amplifiers of the next generation of measuring devices
  • EUCA_APECS - Pilot Line for Advanced Packaging and Heterogeneous Integration for Electronic Components and Systems
  • FlaMe - Fully controlled lot-size 1 manufactured Power Modules
  • MIGPix - Photodetector array
  • NeurOSmart - Analogous neuromorphic accelerators to enable efficient and secure smart sensors
  • Size Is Important 2 - Evaluation of silicon membranes for the analysis of sub-µ plastic particles in the environment
  • VerGaN - Vertical GaN chip development with innovative module and output stage design (VerGaN)
  • RELPLAS - Increased quality assurance of plasma processes
  • Powercare - Motor control with integrated failure prediction for next-generation power semiconductors

Electronic Energy Systems

  • Heart4Farms - Assessment of the potential of Super-HEART technology for vertical farming
  • AC2DC - Phase II - Increasing the transmission capacity in the distribution grid with existing AC connections as DC lines - proof of feasibility in the field
  • Potential and challenge of hybrid system - Potentials and challenges of a hybrid, power electronics-based energy system
  • Data fusion for power module - phase II - Data Fusion for state-of-health estimation of power module
  • Grid-serving storage solutions - Study on the potential of grid-serving storage solutions in the MV electricity grid
  • Super-HEART - a fault-tolerant and highly efficient energy hub with embedded short-term energy storage for high availability electric power delivery

Micro Manufacturing

  • 3D-ACC HOPE - Multi-Project Wafer Run and process verification for 3D-accelerometer
  • Condias-MEMS electrodes - Production of wafers with MEMS electrodes for micro-ozone generators
  • DMSonSOI - Verification of the available process flow for manufacturing a strain gage on SOI <110> wafers
  • Glass-Si composites for NanoSCAn - Development of glass-Si composite substrates for the construction of ion traps
  • Phoenix - Transfer of fabrication process for e-beam masks
  • Printhead - Process development and build up of next generation printhead
  • Sicoya reflector surface development - Development of a manufacturing process for reflector surfaces below the grating couplers of optical waveguides
  • Si-Glass manifold substrate - Glass-Silicon Manifold Substrate Fabrication for Glass Frit Bonding
  • Test wafers with gold structures - Test wafers with gold structures for bonding
  • TROM - Transfer of fabrication process for a switchable e-beam mask
  • MEMS-Boro BMWi-MfV - Development of a 3D endoscope based on a MEMS 3D camera for the inspection of engine components
  • PiMAR1-MfV - Piezo MEMS Micromirror for Augmented Reality Manufacturing and improving the manufacturability of piezo-MEMS based hermetically encapsulated mirrors for AR/VR applications