Fraunhofer Institute for Silicon TechnologyCongress
Attend our presentations on the future-oriented key technologies of microelectronics and microsystems engineering at the MikroSystemTechnik (MST) Congress in Ludwigsburg from November 8-10, 2021. At what has always been the largest national conference, you will have the opportunity to discuss the current state of the art with our experts. Benefit from an intensive exchange and learn how significant these technologies are for economic power and our common good and what future opportunities they offer. We look forward to seeing you!
Program of the Fraunhofer ISIT
Topic |
Date |
Title |
Speaker |
Room |
| P1.A: Components: Microsystems | 09.11.2021 15:10-16:15 |
New optopackaging concepts with electrical feedthroughs and optics microassembly by direct laser soldering | Vanessa Stenchly, Wolfgang Reinert | |
| P1.B: Technologies: Materials, AVT & Simulation | 9.11.2021 15:10-16:15 |
Increasing the stability and piezoelectric response of aluminum-scandium nitride based ferroelectric double layer actuators. | Tom-Niklas Kreutzer, Simon Fichtner, Bernd Wagner, Fabian Lofink | |
| A 5: Materials | 10.11.2021 13:55 |
High-performance, flexible, high-throughput: A process for the next level of AlScN-based PiezoMEMS | Simon Fichtner, Muhammad Zubair Ghori, Jingxiang Su, Tom-Niklas Kreutzer,Florian Niekiel, Dirk Kaden, Matthias Rickers, Fabian Stoppel, Fabian Lofink | Room 1 |
| P2.A: Applications: Environment | 10.11.2021 14:35–15:35 |
Increasing the performance of piezoelectric energy harvesters through the integration of AlScN layers | Torben Dankwort, Erdem Yarar, Sven Gruenzig, Björn Gojdka, Simon Fichtner, Fabian Lofink | |
| P2.B: Applications: Health & Care | 10.11.2021 14:35–15:35 |
Development of a calorimetric two-wire mass flow sensor for water based on glass substrates | Norman Laske, Thomas Lisec, Thomas Knieling, Gunnar Wille | |
| D 6: Microactuators & Energy Harvesters (3) | 10.11.2021 15:35 |
Performance and application examples of magnetically excited piezoelectric energy harvesters. | Torben Dankwort, Björn Gojdka, Marc Alexander Nowak, Mani Teja Bodduluri, Sven Gruenzig, Minhaz Ahmed, Fabian Lofink | Room 4 |
