Under the motto "People make microelectronics", this year's MikroSystemTechnik (MST) congress will take place in Dresden from October 23 - 25, 2023.
Use the congress to get to know Fraunhofer ISIT in the formation Forschungsfabrik Mikroelektronik Deutschland (FMD). Benefit from an intensive exchange and learn how significant these technologies are for the economic power and our common good and which future opportunities they offer.
We look forward to seeing you!
FMD as a cooperation of the Fraunhofer Group for Microelectronics with the Leibniz Institutes FBH and IHP is the central point of contact for all issues related to micro- and nanoelectronics in Germany and Europe.
As a one-stop store, FMD has been combining scientifically excellent technologies and system solutions from its 13 cooperating institutes from the Fraunhofer-Gesellschaft and Leibniz Association into a customer-specific overall offering since 2017. Under the virtual umbrella of FMD, the largest association of its kind in Europe has been created, with more than 4,500 employees and a unique diversity of expertise and infrastructure.
As a pioneer in cross-location and cross-technology cooperation, FMD actively addresses the current and future challenges of electronics research and thus ensures the preservation and expansion of Germany's and Europe's technological sovereignty. As a strategic dialog partner, FMD actively contributes to the German and European research agenda, providing important impetus for the development of elementary innovations for tomorrow's world.
Ultrasonic sensors have been used successfully for many years in industry, medicine and automotive engineering. In this context, micromechanical ultrasonic transducers (MUT) are becoming increasingly important due to their compact design, high sensitivities and cost-effective manufacturing. An alliance of the three Fraunhofer institutes ENAS, IPMS and ISIT bundles their expertise in the field of MUT within the Research Factory Microelectronics Germany (FMD) and offers a broad technology portfolio, consulting and research services for a variety of application fields as well as pilot fabrication in the institute's own clean rooms.
In order to improve the perception of the environment by miniaturized sensors k and to demonstrate human-machine interfaces, Fraunhofer ISIT equips robot arms with PMUT. In the future, this platform will be used to demonstrate the potential of PMUT for diverse application scenarios, from simple distance measurements and haptic feedback to complex object recognition tasks in medical imaging.
Fraunhofer ISIT has developed a microfabrication technology that enables the integration of wafer-level micromagnets. These magnets can be used as support magnets of magnetic field sensors. The magnets are integrated into the substrate to achieve a high degree of miniaturization and save space on the wafer. In- and out-of-plane support fields can be fabricated in customized arrangements for Hall and XMR magnetic field sensors.
Using this technology, Fraunhofer ISIT and IIS have realized a fully integrated 3D Hall sensor. The demonstrator combines Fraunhofer IIS' 3D HallInOne® Hall sensor technology with Fraunhofer ISIT's PowderMEMS technology.
Technology
The support magnets are manufactured using the PowderMEMS process developed by Fraunhofer ISIT. The process enables precise integration of the magnets directly into the sensor wafer.
Microfine magnetic powders are filled dry into microcavities and solidified by low temperature ALD. The magnets are chemically resistant and thermally stable and can be manufactured from a wide range of magnetic materials.
Fraunhofer Institute for Silicon Technology