Fraunhofer Institute for Silicon TechnologyTrade Fair
Take the opportunity and meet our experts at the 25th Laser Photonics World's Leading Trade Fair in Munich for Photonics Components, Systems and Applications.
Our experts will be there to share with you their many years of know-how on microsystems for optical applications!
Excited to know what our key exhibits are? 👀
👉 Opto-Packaging: 3D glass forming technology, RGB light engine
👉 Micro optical components & systems: Lenses, mirrors & arrays
👉 MEMS scanners: for LiDAR systems & laser material processing
Fraunhofer ISIT will present microsystems for optical applications on the following main topics at LASER 2022:
Laser Material Processing
High Power Laser Scanners for Laser Material Processing, Laser Welding, Laser Cutting etc. The new MEMS scanners developed by Fraunhofer ISIT allow the fast deflection of laser radiation with up to 4.5 kWatt at scan frequencies in the kilohertz range. This allows a significant increase in throughput for many manufacturing processes and, in many cases, new functionality and quality enhancements. Dielectrically coated, highly reflective mirrors with apertures of up to 20 mm are unique worldwide.
MEMS LIDAR systems
The 3D LIDAR camera is based on a 2D MEMS scanner which uses the principle of phase difference of an emitted laser beam to the detected "echo" as distance measurement. The phase detection algorithm allows 60 million 3D measurements per second. The camera has a resolution of 450 x 450 pixels and delivers six images per second. The depth resolution is said to be a few millimeters and the maximum detectable distance to the object is 2 m.
Opto-Packages
Opto-Packages for wafer-level packaging.
Remelted glass wafers with specially adapted optical functions.
Based on a glass wafer reshaping technique developed and patented by Fraunhofer ISIT, specially shaped optical windows can be mass produced at wafer level, enabling low-cost mass production of optical packages. In the context of MEMS scanners and IR MEMS devices, this manufacturing process is the key to hermetically encapsulated MEMS devices with optimal optical functionality.
Microlenses, micromirrors, and microlens arrays
Fraunhofer ISIT develops various customized lenses and mirrors on glass wafers. The manufacturing process is particularly suitable for the production of precision optics with high uniformity and reproducibility. The process, known as hot viscous molding, can now also be used to produce aspherical optics for the optical and IR fields.
