The Microfabrication Processes business unit is one of the largest and most technologically central areas at Fraunhofer ISIT. Its focus lies on the development and optimization of processes for manufacturing microstructured, multi-material systems—particularly for applications in microelectronics and related future fields.

“This business unit addresses industrial requirements for new manufacturing approaches for microstructured components and systems,” explains Lilleodden. “Our work benefits significantly from the close integration with other business units as well as direct access to the institute’s cleanroom infrastructure.”

Prof. Dr. Erica Lilleodden is an internationally experienced materials scientist with professional stations in the United States and Germany. After completing her PhD at Stanford University, she worked at leading research institutions including Lawrence Berkeley National Laboratory and Sandia National Laboratories.

In Germany, she significantly shaped materials research at Helmholtz-Zentrum Hereon and served as a professor at Hamburg University of Technology. Most recently, she was Director of the Fraunhofer Institute for Microstructure of Materials and Systems IMWS in Halle (Saale).

2 Her move to Fraunhofer ISIT also reflects a deliberate shift in perspective: “The role of a business unit head enables much closer collaboration with scientists and industry partners at an operational level,” says Lilleodden. “I aim to actively shape the scientific strategy and further expand activities in testing and diagnostics.”

A key differentiating factor of ISIT, according to Lilleodden, is its holistic approach to microfabrication processes: “We do not only develop processes—we also identify new functionalities and systematically investigate the reliability of the resulting systems,” she explains. “Diagnostic methods play a crucial role, especially in understanding why devices perform as expected—or why they do not.”

Requirements for microsystems continue to grow, driven by technological, economic, and societal developments.

“The pressure to innovate is enormous,” Lilleodden emphasizes. “Systems must become more powerful, more sustainable, and at the same time more cost-efficient—often under conflicting constraints.”

Fraunhofer ISIT addresses these challenges through application-oriented research and close collaboration with industry partners. The goal is to align technologies with industrial requirements at an early stage and transfer them efficiently into practical applications.

A particular focus lies on strengthening microelectronics in Germany and Europe. In the context of the Research Fab Microelectronics Germany (FMD) and European initiatives such as the EU Chips Act, Lilleodden sees significant opportunities for ISIT: “We will increasingly work on complex challenges that are critical for Europe’s technological sovereignty—such as prototyping, process optimization, and wafer-level packaging,” she states.

n her new role, Lilleodden emphasizes teamwork, interdisciplinary exchange, and the targeted promotion of young researchers: “Every individual contributes to the overall success with their unique skills. It is essential to recognize and develop these strengths together,” she says.

She places particular importance on linking scientific excellence with real-world application: “Research at Fraunhofer means translating knowledge into solutions that have tangible impact.”

Looking ahead, Lilleodden has a clear objective: to position the Microfabrication Processes business unit as a leading partner for innovative manufacturing technologies—both nationally and internationally.

“Our contribution to the microelectronics ecosystem is essential,” she concludes. “We develop technologies that enable future applications—from AI and quantum technologies to advanced medical sensing.”

The Fraunhofer Institute for Silicon Technology ISIT is one of Europe’s most advanced research institutions for microelectronics and microsystems engineering. Its core infrastructure includes state-of-the-art cleanroom facilities that provide excellent research conditions while enabling the industrial-scale fabrication of developed microchips. Around 190 scientists at ISIT work closely with industry partners to develop components for power electronics and microsystems, including applications in photonic systems and quantum computing.