Fraunhofer Institute for Silicon Technology
Fraunhofer Institute for Silicon Technology

Projects

MEMS-Applications

  • PiMAR1 – Piezo MEMS Micromirror for Augmented Reality
  • Smarties – MEMS Energy Harvesting for Smart Tires
  • HERMES – Fabrication of ultra-compact MEMS sensors using laser-based integration techniques
  • MEMS-Boro BMWi – Development of a 3D endoscope based on a MEMS 3D camera for the inspection of engine components
  • Feelscreen – High-performance PMUTs for haptic displays
  • PRECISE – Intelligent solution for sustainable meat production and consumption
  • Fast MEMS Mirror for LIDAR – MHZ 1D MEMS mirror for LIDAR
  • KonneQt - MEMS mirrors for internal connectivity in quantum computing
  • MEMS Mirror with Silflex - MEMS mirror with Silflex as the reflective surface
  • MEMS Mirror for Methodology - MEMS mirror with circular motion to reduce measurement noise
  • Printhead Phase2a2 und Project Phase 2b – Feasibility on CMOS substrates for project PRINTHEAD
  • ActiveWave - Active waveguides
  • Dualeyes+ - MEMS Mirror for industriel LIDAR
  • Magnetoelektrische Sensoren – Magnetoelectric Sensors: From Composite Materials to Biomagnetic Diagnostics
  • IMU device - 6DOF IMU Devices
  • AlScN Doppellagen für MEMS Bauteile – Evaluation of piezoelectric AlScN bilayers for MEMS components
  • EUCA_FAMES – AlScN Memristors on CMOS Millenion_SGA_I - Millenion Quantum
  • Millenion – Ion Trap Quantum Computer
  • MEDUSA - Multifunctional sapphire-coated aluminum feed-throughs
  • Sqale-ISIT – MEMS mirror and PIC Modulator
  • TOPAL-ISO – Isotrope PowderMEMS Magnete
  • Ultrasonic MEMS for monitoring - Ultrasonic MEMS transducers for acoustic monitoring
  • NeuroSmart- Analog neuromorphic accelerators that enable efficient and secure smart sensors
  • Discover_InLas - Infrared lenses produced using laser-based manufacturing
  • EUCA_APECS – APECS_ISIT
  • MAGIQ - Magnetoacoustic Scalable Control of Qubits for Quantum Technologies
  • Micro-Magnetic - PowderMEMS Technology Development for Magnetic Applications
  • VollMini
  • PowderGridNDT - X-ray diffraction grating for non-destructive material analysis
  • FaradalC (FSENS II) –Glass wafers with Au and Ag metal electrodes and dielectric polymer layers
  • EUCA_APECS - APECS_ISIT

Micro-Manufacturing Processes

  • Glas-Si Komposite for NanoSCAn - Development of glass-silicon composite substrates for the construction of ion traps
  • DMSonSOI - Verification of the available process flow for the fabrication of a DMS on SOI-<110> wafers
  • SAFETOUCH - SELF-DISINFECTING, SMART MICROFILMS FOR HEALTHCARE & COMMUNITY ACQUIRED INFECTIONS
  • SimuCast - Simulation of capillary flow processes in protective coatings, encapsulants, and underfill materials during application to electronic assemblies to enhance protection against corrosion and electrochemical migration (SimuCast)
  • EUCA_APECS - APECS_ISIT

Leistungselektronik

 

  • Size Is Important 2 - Evaluation of silicon membranes for the analysis of sub-micron plastic particles in the environment
  • VerGaN - Vertical GaN Chip Development with Innovative Module and Power Amplifier Design (VerGaN)
  • EUCA_APECS - APECS_ISIT
  • VisGaN - Development and characterization of power semiconductors

 

Elektronische Energiesysteme

  • Data fusion for power module – phase II - Data Fusion for state-of-health estimation of power module
  • OCEAN-H”2 - Offshore Green Hydrogen Production for Multi-use Purposes
  • STEESMAT - SST for ships - Demonstrating efficient fully DC electric grids within waterborne transport for large ship applications
  • DC-Kore|MMC4EES&P2G – Development of A Bidirectional Hybrid MMC for ESS and P2G System  integration based on MVDC
  • DC_Kore|MPC4FCS – Development of a DC-DC Converter Considering the Safety and Efficiency Improvement of Fast Chargers and Battery Energy Storage System
  • DC_Kore|AuxPowerDTwin – Development of Digital Twin of High Isolation Voltage Auxiliary Power Supply for Efficiency Improvement
  • DC_Kore|CirBreaker – Research and Development of Multi-Breaking Point based 5kV DC Circuit Breaker
  • DC_Kore|HIL4DistriPowerSyst – Simulation Modeling of LVDC Distributed Power System for HIL-based Testing of Integrated Controllers
  • DC_Kore|MVCirBreaker – Investigation  and Definition of a Draft of Demonstration Test for MVDC Circuit Breaker Performance Evaluation
  • DC_Kore |SST4MeshGrids - Development of Simulation Models for Smart Transformers Integrated in AC–DC Meshed Grids
  • DC_Kore_|DCCharging - Development of Simulation Models for MV-LVDC Hybrid Charging Station Connected to DC grids
  •  StartGFM – Identify and pilot suitable sub-network utilization methods for grid-forming inverters (GFM)
  • Super-HEART -  a fault-tolerant and highly efficient energy hub with embedded short-term energy storage for high availability electric power delivery
  • AC2DC - Design and Control of an MMC for AC/DC Conversion

Battery Systems/ FAB-SH

  • SiLine - Development of large-area, porous Si-Fim anodes for lithium/silicon-NMC energy storage systems (SiLiNE) with a view to industrial production.
  • Qualifizierung von Pouchfolien - Assessment of the suitability of the AluFlex® pouch film manufactured by Bischof + Klein for use in lithium-ion pouch cells and its potential use at FFB Münster
  • TroPMelt – Dry Coating - Dry Powder Melt Calendering for Environmentally Friendly and Cost-Effective Electrode Production
  • QuW-LIB - Training and continuing education for skilled workers across the entire value chain of sustainable lithium-ion batteries
  • LISSY - Innovative electrodes for lithium-sulfur batteries 

FAB

 

  •  Green ICT -Establishment of a Green ICT Competence Center