Detection of weak magnetic fields

Research & Development

MEMS magnetic field sensor with integrated Powder-based permanent magnets.

Resonant MEMS magnetic sensors can detect weak magnetic fields. The sensitivity of the ISIT sensors to an external magnetic field is realized either by a monolithically integrated hard magnet made of NdFeB (PowderMEMS) or with a magnetostrictive thin film. Both approaches are capable to achieve a LoD of a few pT in resonance and a few nT outside resonance. The electrical conversion of the signals in both cases is done via AlN (Piezo MEMS) which enables a low noise level and a high voltage output.

Technologies for: Measuring biomagnetical fields in unshielded environment as well as weak noise fields in Quantum Computing / Quantum Sensing, current measurement with high dynamic range. Suitable for use in arrays and for applications with high spatial resolution.

Limit of detection in dependence of frequency for sensors with different resonance (2.2 kHz and 3.6 kHz) both archiving a minimum LOD of 7.2 pt/ Hz^0.5.

Overview

Characteristics

  • Spatial resolution < 500 µm
  • LoD < 10 pT in resonance and < 10 nT outside
  • sensitivity of up to 40 kV/T
  • 6 orders of magnitude dynamic range
  • no DC capability 

USPs & Benefits

  • Able to weak magnetic fields in unshielded environment (gradiometer setup)
  • accurate current measurement even with large background signal
  • suitable for use in array applications
  • insensitive to a superimposed DC magnetic field

Application

  • Measuring biomagnetical fields in unshielded environment
  • current measurement with high dynamic range
  • Suitable for use in arrays and for applications with high spatial resolution