Research & Development
Resonant MEMS magnetic sensors can detect weak magnetic fields. The sensitivity of the ISIT sensors to an external magnetic field is realized either by a monolithically integrated hard magnet made of NdFeB (PowderMEMS) or with a magnetostrictive thin film. Both approaches are capable to achieve a LoD of a few pT in resonance and a few nT outside resonance. The electrical conversion of the signals in both cases is done via AlN (Piezo MEMS) which enables a low noise level and a high voltage output.
Technologies for: Measuring biomagnetical fields in unshielded environment as well as weak noise fields in Quantum Computing / Quantum Sensing, current measurement with high dynamic range. Suitable for use in arrays and for applications with high spatial resolution.