Optatec 2024

In addition to eye safety and the detection of reflected laser beams, scanning the laser beam over a two-dimensional area represents a major challenge in the field of distance measurement. Due to high demands on long-term stability, mechanical shock resistance and the reproducibility of the FoV (Field of View), the systems are large and require large amounts of energy in addition to the laser source. The system is miniaturized with MEMS scanners (micro-electromechanical systems). Resonant MEMS scanners achieve an optical FoV of 60°x30° at a high speed. Vector scanners ensure reliable beam guidance even at low frequencies of a few hearts.

Projection with MEMS scanners presents exciting challenges. The beam guidance with sinusoidal oscillating systems in two axes leads to so-called Lissajous patterns. In order to generate an image with these, it is extremely important to know the exact deflection of the mirror plate and therefore the position of the laser beam on the screen. You can marvel at the sophisticated electronics that control the RGB laser source on the basis of this information in our demonstrator.

In the world of quantum mechanics, high-precision tools are needed to manipulate and read qubits. It fills us with great pride that our MEMS scanners can fulfill the diverse requirements of quantum computing. The completely new approaches lead to completely different specifications, which, thanks to the great flexibility in design and process at Fraunhofer ISIT, lead to fast solutions and new ideas.

For a particularly high resolution to determine the current deflection of the MEMS scanners, an exact calibration of the voltage on the piezoelectric material to the resulting mechanical movement is often not sufficient. However, the deflection itself causes a piezoelectrically induced measurable voltage. Special sensor elements on the actuators of vector scanners are intended to ensure that the deflection can be reliably determined in real time, and not only in resonant operation.

In addition to maximum precision, the heat input of the laser to the scanning unit is also of great importance in laser material processing. In addition to reliable partners for coating the mirror plates with highly reflective surfaces, we have extensive experience in dealing with heat dissipation in the MEMS scanner system. As a result, several kilowatts of laser power can be reliably and precisely deflected even with miniaturized MEMS. Talk to our experts about it!

Remelted glass wafers with specially adapted optical functions.

Based on a glass wafer forming technique developed and patented by Fraunhofer ISIT, specially shaped optical windows can be mass-produced at wafer level, enabling cost-effective mass production of optical packages. In connection with MEMS scanners and IR MEMS devices, this manufacturing process is the key to hermetically encapsulated MEMS devices with optimal optical functionality.

Fraunhofer ISIT develops various customized lenses and mirrors on glass wafers. The manufacturing process is particularly suitable for the production of precision optics with high uniformity and reproducibility. The process, known as hot viscous molding, can now also be used to produce aspherical optics for the optical and IR range.