A process based on hot viscous molding of glass has been developed at Fraunhofer ISIT. With the help of this process, it is possible to structure glass wafers with high aspect ratios at wafer level in such a way that the good optical properties are retained.
With the help of this unique technology, new components can be manufactured from glass at wafer level for the first time that meet the qualitative requirements of optics. Thus, microlenses, reflectors and specially shaped optical windows can be realized in large quantities at wafer level without further mechanical processing, which enables cost-effective mass production of micro-optical devices (wafers with gold-plated concave mirrors). In combination with MEMS scanners and active optical devices, this manufacturing process is the key to hermetically encapsulated MEMS devices that meet the high demands of optical functionality (MEMS mirrors with slanted windows).
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