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Fraunhofer Institute for Silicon Technology
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Research Fab Microelectronics Germany
Prof. Dr. rer. nat. habil. Axel Müller-Groeling
ISIT Quality-Managementsystems
Power Electronics
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Power Electronics
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Micro-Manufacturing Processes
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Application Center for Process Technology in Assembly Manufacturing
Lighthouse project
TROM2 chip: A chip for mask production
MEMS Applications
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MEMS Applications
Agglomerated Microsystems
Micromagnetics
Energy Harvester
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Optical Systems
3D Camera
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Piezoelectric driven MEMS scanner
Acoustic systems and microdrives
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Technology
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Technology
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Semiconductor Technology for Powerdevices
GaN-Transistor
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Bonder and Debonder
SEM and FIB
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Power Converter Test Bench
Thermal Imaging
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Rapid Prototyping Control
Double Pulse Test Bench
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Micro-manufacturing processes
Processes on Wafer-Level
Lithography
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Chemical Vapor Deposition (CVD)
Sputtern & Evaporieren
Electroplating
Electroless Ni / Pd / Au Plating (ENEPIG)
Reactive Ion Etch (RIE)
Chemical-mechanical polishing (CMP)
Assembly production, quality and reliability
MEMS-Applications
Piezo MEMS Technology Platform
Poly Silicon MEMS Technology Platform
Powder MEMS Technology Platform
MEMS cleanroom | 360° tour
Clean room game
Events
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Events
Aspekte moderner Siliziumtechnologie
CMP-Usermeetings
CMP 41
Wet 12
ISIT-Lötseminare für die Baugruppenfertigung
Online Events & Webinars
Events
Hands-On Lithium-Ion Battery Seminar
Fraunhofer Annual Conference 2021
FED Conference: PCB Design for Production
Citizens' festival: 75 years of the state of Schleswig-Holstein
Technlogy Seminar - Design for Manufacturing
Lumen + Colours
Science Match 2021
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TechBlog of Fraunhofer ISIT
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Information on the COVID-19 pandemic for customers, cooperation partners and service providers of Fraunhofer ISIT
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Fraunhofer Institute for Silicon Technology