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Fraunhofer Institute for Silicon Technology
Fraunhofer Institute for Silicon Technology
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Fraunhofer Annual Conference 2021
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Seminar | Smart Power - Battery technologies and the way to sustainable electrification
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Events
CMP-Usermeetings
cmpum28
Events
5. Wet Users Meeting
Agenda, participant's list and single talks
Agenda 5th Wet Users Meeting [ PDF 0.07 MB ]
Participants [ PDF 0.19 MB ]
K.Gottfried, FhG ENAS, Wet Processes within MEMS [ PDF 1.55 MB ]
G.Zwicker, FhG ISIT, Micro Ozone Generator [ PDF 1.07 MB ]
B.Hammerl, Siconnex, Metal Stack Etch & Resist Strip [ PDF 0.59 MB ]
Th.Passler, AMAT, E & EL Deposition Technologies [ PDF 1.38 MB ]
H.Kumschier, Veeco, Surface Processing Overview [ PDF 3.06 MB ]
Fraunhofer Institute for Silicon Technology